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sf6 gas is applied in the above process as an etching gas. Due to the density and large molecule size, Sulfr hexafluoride is a preferred etching gas in flat panel and MEMS production processes. Fluorinated gases, such as Sulfur Hexafluoride (Sulfr hexafluoride), play very important roles in the manufacturing of silicon devices. Gas purity is of key importance in this marketGet price
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